Infrared optics-Infrared lens photolithography
Product Parameter
Technical requirement |
Tolerance |
Minimum line width |
1.5um |
Maximum area |
180mm |
Image tolerance |
±0.5um(Based on photoetching area ) |
Depth |
0.05um-10um(Based on width of image) |
Depth tolerance |
±0.001um |
Material |
Si、Ge、Znse、ZnS and othe infrared material ect |
|